Major semiconductor manufacturers around the world choose our semiconductor quartz tubing for its consistent chemical purity and high temperture resistance. Our unique, vertically integrated manufacturing process allows us to meet customers' demands for quality and reliablity.
Grades
SYLVANIA produces two grades of quartz for the semiconductor industry. These include SG25, our standard high purity grade and SG28, which provides for low alkali and therefore higher thermal resistance. For each of these tubing grades we provide direct draw, resize, heavy wall, baked and unbaked options based on customers' specific needs.
Applications
Applications commonly include furnace tubes for oxidation, CVD and diffusion processes, end caps, transfer carriers, thermocouple tubes, wafer carriers, end plates, baffles, and bell-jars for epitaxial reactors.
For more information see our Capabilities Guide or contact us...